Record-breaking Frequency of 44 GHz Based on Higher Order Mode of Surface Acoustic Waves with LiNbO3/SiO2/SiC Heterostructures

Zhou, Jian, Zhang, Dinghong, Liu, Yanghui, Zhuo, Fengling, Qian, Lirong, Li, Honglang, Fu, Yong Qing and Duan, Huigao (2022) Record-breaking Frequency of 44 GHz Based on Higher Order Mode of Surface Acoustic Waves with LiNbO3/SiO2/SiC Heterostructures. Engineering. ISSN 2095-8099 (In Press)

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Surface acoustic wave (SAW) technology has been extensively explored for wireless communication, sensors, microfluidics, photonics, and quantum information processing. However, due to fabrication issues, the frequencies of SAW devices are typically limited to within a few gigahertz, which severely restricts their applications in 5G communication, precision sensing, photonics, and quantum control. To solve this critical problem, we propose a hybrid strategy that integrates a nanomanufacturing process (i.e., nanolithography) with a LiNbO3/SiO2/SiC heterostructure and successfully achieve a record-breaking frequency of about 44 GHz for SAW devices, in addition to large electromechanical coupling coefficients of up to 15.7%. We perform a theoretical analysis and identify the guided higher order wave modes generated on these slow-on-fast SAW platforms. To demonstrate the superior sensing performance of the proposed ultra-high-frequency SAW platforms, we perform micro-mass sensing and obtain an extremely high sensitivity of approximately 33151.9 MHz·mm2·μg−1, which is about 1011 times higher than that of a conventional quartz crystal microbalance (QCM) and about 4000 times higher than that of a conventional SAW device with a frequency of 978 MHz.

Item Type: Article
Additional Information: Funding information: This study was supported by the National Science Foundation of China (NSFC No.52075162), The Program of New and High-tech Industry of Hunan Province (2020GK2015, 2021GK4014), The Excellent Youth Fund of Hunan Province (2021JJ20018), Joint fund of the Ministry of Education (Young talents), the Key Research Project of Guangdong Province (2020B0101040002), the Natural Science Foundation of Changsha (kq2007026), Tianjin Enterprise Science and Technology Commissioner Project (Grant No. 19JCTPJC56200), and the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and International Exchange Grant (IEC/NSFC/201078) through Royal Society and the NSFC.
Uncontrolled Keywords: Ultra-high frequency, SAW, Higher order mode, Hypersensitive detection
Subjects: H800 Chemical, Process and Energy Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Elena Carlaw
Date Deposited: 10 May 2022 09:50
Last Modified: 22 Jun 2022 16:15

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