Wang, Yong, Zhang, Qian, Tao, Ran, Li, Dangsheng, Fu, Yong Qing and Xie, Jin (2022) Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes. In: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022). IEEE Symposium on Mass Storage Systems and Technologies, 2 . IEEE, Piscataway, US, pp. 904-907. ISBN 9781665409124, 9781665409117
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MEMS 2022-ACOUSTOFLUIDIC BEHAVIORS OF ZNOAL PLATESHEET ACOUSTIC WAVE DEVICES USING HYBRID MODES.pdf - Accepted Version Download (605kB) | Preview |
Abstract
In this paper, we report acoustofluidic behaviors of zinc oxide (ZnO) thin film surface acoustic wave (SAW) devices fabricated on aluminum (Al) plate/sheet (600m/200m) substrates using hybrid modes. Finite element analysis (FEA) ulation and experimental results indicate that the wave vibration modes are changed from Rayleigh mode to hybrid modes and subsequently to Lamb wave modes with the increased device's wavelength or decreased substrate thickness. For the Rayleigh, hybrid and zero-order Lamb wave modes, the droplet movement is a combination of rolling and sliding, whereas for Sezawa mode and one-order Lamb wave modes, the droplet movement is a combination of jumping and sliding. Moreover, for Lamb wave modes, the asymmetrical modes present a better pumping performance than those of symmetrical modes.
| Item Type: | Book Section |
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| Additional Information: | Funding Information: This work is supported by the National Natural Science Foundation of China under Grant No. 51875521, the Zhejiang Provincial Natural Science Foundation of China under Grant No. LZ19E050002, the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and UK Fluidic Network (EP/N032861/1) Special Interest Group of Acoustofluidics, International Exchange Grant (IEC/NSFC/201078) through the Royal Society, and the National NSFC. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022; Tokyo, Japan; 9-13 Jan 2022 |
| Uncontrolled Keywords: | Acoustofluidics, ZnO thin film , Al plate/sheet, SAW, hybrid modes |
| Subjects: | F200 Materials Science F300 Physics |
| Department: | Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering |
| Depositing User: | John Coen |
| Date Deposited: | 18 Aug 2022 11:32 |
| Last Modified: | 18 Aug 2022 11:45 |
| URI: | http://nrl.northumbria.ac.uk/id/eprint/49899 |
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