Strategies for Giant Mass Sensitivity Using Super-High-Frequency Acoustic Waves

Zhou, Jian, Liu, Yanghui, Zhan, Zhengjia, Zhuo, Fengling, Ji, Zhangbin, Zheng, Yuanjin, Fu, Yong Qing and Duan, Huigao (2022) Strategies for Giant Mass Sensitivity Using Super-High-Frequency Acoustic Waves. IEEE Sensors Journal, 22 (21). pp. 20336-20345. ISSN 1530-437X

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Surface acoustic wave (SAW) devices are powerful platforms for mass sensing, chemical vapor or gas detection, and biomolecular identification. Great efforts have been made to achieve high sensitivities by using super-high-frequency SAW devices. Conventional SAW sensing is based on mass-loading effects at the acoustic wave propagation (or delay line) region between two interdigitated transducers (IDTs). However, for many super-high-frequency SAW devices with their small sizes, there is a huge challenge that the sensitivity is difficult to be further increased, simply because there are very limited areas between the IDTs to deposit a sensing layer. Herein, we proposed a novel strategy based on giant mass-sensitivity effects generated on the global area of acoustic wave device (defined as areas of both delay line region and IDTs), which significantly enhances sensitivity and reduces the detection limit of the SAW device. Both theoretical analysis and experimental results proved this new strategy and mechanism, which are mainly attributed to the efficient energy confinement at the IDTs' region for the super-high-frequency SAW devices. The achieved mass sensitivity using this new strategy is as high as 2590 MHz · mm2·μg-1, which is about 500 times higher than that obtained from only using the acoustic wave propagation region with a SAW frequency of 4.43 GHz. Hypersensitive humidity detection has been demonstrated using this newly proposed sensing platform, achieving an extremely high sensitivity of 278 kHz/%RH and the fast response and recovery times of 37 and 35 s, respectively.

Item Type: Article
Additional Information: Funding information: This work was supported in part by the Natural Science Foundation of China (NSFC) under Grant 52075162; in part by the Program of High-Tech Industry of Hunan Province under Grant 2020GK2015 and Grant 2021GK4014; in part by the Natural Science Foundation of Hunan Province under Grant 2021JJ20018; in part by the Joint Fund of the Ministry of Education (Young Talents); in part by the Engineering Physics and Science Research Council (EPSRC), U.K., under Grant EP/P018998/1; and in part by the International Exchange Scheme through the Royal Society and NSFC under Grant IEC/NSFC/201078.
Uncontrolled Keywords: Electrodes, Hypersensitivity sensors, Loading, Resonant frequency, SAW, Sensitivity, Sensors, Surface acoustic wave devices, Surface acoustic waves, Ultrahigh frequency, global area, mass-loading effect
Subjects: H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Elena Carlaw
Date Deposited: 25 Nov 2022 15:07
Last Modified: 25 Nov 2022 15:07

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