Microlens array produced using hot embossing process

Ong, N.S., Koh, Y.H. and Fu, Yong Qing (2002) Microlens array produced using hot embossing process. Microelectronic Engineering, 60 (3-4). pp. 365-379. ISSN 0167 9317

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Abstract

In this paper, the fabrication of molds that are suitable for the production of microlens arrays using the replication technique is discussed. Variation of parameters in the replication process were investigated. A focused ion beam was used to fabricate the microlens cavities on three materials, with silicon showing the best result. Hot embossing was used to produce replicated polycarbonate lens array. The temperature of the mold and the embossing force were the two parameters varied. The microlens array produced using the embossing replication process demonstrates the possibility of nanometre fabrication.

Item Type:	Article
Uncontrolled Keywords:	Microlens array, focused ion beam, hot embossing
Subjects:	F200 Materials Science H300 Mechanical Engineering H800 Chemical, Process and Energy Engineering
Department:	Faculties > Engineering and Environment > Mechanical and Construction Engineering
Depositing User:	Users 6424 not found.
Date Deposited:	11 Jan 2016 16:17
Last Modified:	12 Oct 2019 23:10
URI:	http://nrl.northumbria.ac.uk/id/eprint/25350

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