Diffraction grating-based optical readout for thermal imaging

Adiyan, Ulas, Erarslan, Refik Burak, Ferhanoglu, Omur, Torun, Hamdi and Urey, Hakan (2012) Diffraction grating-based optical readout for thermal imaging. In: SPIE Optical Systems Design 2012, 26th - 29th November 2012, Barcleona, Spain.

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Abstract

The thermal sensor system presented in this paper is based on the mechanical bending due to the incident IR radiation. A diffraction grating is embedded under each pixel to facilitate optical readout. Typically the first diffraction order is used to monitor the sub-micron mechanical displacement with sub-nanometer precision. In this work; two different optical readout systems based on diffraction gratings are analyzed. First setup employs a conventional 4f optical system. In this one-to-one imaging system, collimated light is propagated through a lens, filtered with an aperture and then imaged onto a CCD by a second lens. Second system is more compact to improve image quality and to reduce noise. This is achieved by using an off-axis converging laser beam illumination that forms the Fourier plane near the imaging lens. This approach has important advantages such as reducing number of optical components and minimizing the optical path. The system was optimized considering parameters such as laser converging angle, laser beam size at MEMS chip, and magnification of the imaging system.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	4f optical system, Converging beam optical system, Diffraction grating, Thermo-mechanical detectors
Subjects:	H300 Mechanical Engineering H600 Electronic and Electrical Engineering
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User:	Paul Burns
Date Deposited:	13 Jun 2019 16:31
Last Modified:	10 Oct 2019 18:03
URI:	http://nrl.northumbria.ac.uk/id/eprint/39688

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