Ultraviolet sensing based on nanostructured ZnO/Si surface acoustic wave devices

Guo, Yuanjun, Zhao, Chao, Zhou, X. S., Li, Yifan, Zu, Xiao-Tao, Gibson, Desmond and Fu, Yong Qing (2015) Ultraviolet sensing based on nanostructured ZnO/Si surface acoustic wave devices. Smart Materials and Structures, 24 (12). p. 125015. ISSN 0964-1726

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Official URL: http://dx.doi.org/10.1088/0964-1726/24/12/125015

Abstract

Ultraviolet (UV) sensor based on nanostructured ZnO/Si Surface Acoustic Wave (SAW) devices is studied in this paper. The ZnO films sputtered onto Si (100) substrate showed a preferred (0002) orientation and good photoluminescence emission. For the SAW device with a wavelength of 64 um, a frequency downshift of ~ 1.4 kHz was observed at the Rayleigh mode under a UV light intensity of 0.6 mW/cm2, whereas the frequency downshift for the Rayleigh mode was increased to 8.3 kHz after integrating ZnO nanorods (NRs) in the ZnO/Si SAW devices. For the SAW device with a wavelength of 20um irradiated under a UV light intensity of 0.6 mW/cm2, a frequency downshift of 25 kHz for the Sezawa mode was obtained compared to a shift of 12 kHz for the Rayleigh mode. After depositing ZnO NRs, the resonant frequency for the Rayleigh mode was increased to 27.4 kHz under the same UV intensity illumination, due to the significant increase in surface-to-volume ratio.

Item Type: Article
Subjects: F200 Materials Science
F300 Physics
H100 General Engineering
H300 Mechanical Engineering
H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mechanical and Construction Engineering
Faculties > Engineering and Environment > Physics and Electrical Engineering
Depositing User: Yifan Li
Date Deposited: 26 Nov 2015 17:09
Last Modified: 10 May 2017 19:33
URI: http://nrl.northumbria.ac.uk/id/eprint/24772

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